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AtOMS Atomic Spectroscopy for Advanced Thin Film Process Control

Atomic Spectroscopy for Advanced Thin Film Process Control

Advances in thin film coating and architectures are quickly outpacing the capacities of conventional monitoring systems. AtOMS (Atomic Absorption Optical Emission Spectroscopy System), powered by Accustrata, enables you to move beyond traditional method of monitoring and process control by measuring where it matters. Establish a competitive edge in manufacturing yield, product performance, and process stability in thin film etching and deposition.

“By working together with ADS and National Instruments, we believe we can solve the toughest RF spectrum record, playback, real-time analysis and real-time emulation problems that face our mutual customers in the aerospace, defense, aviation and communications industries.”

- RADX Technologies

Operational Environments that will benefit from AtOMS

Key Features

  • Developed by Accustrata under US Department Energy Program for in-situ process control in the manufacturing of extreme UV optical coating for 13.5 nm lithography.
  • Simultaneously monitors deposition rate, film, quality and composition.
  • Monitors any material: metals, alloy, opaque materials, semiconductors and dielectrics.
  • Fiber optics-based solution allows installation on any chamber geometry without chamber redesign.
  • Multi-beam measurement close to substrate allows in-situ control of uniformity.
  • Optical components uniquely designed to prevent sensor contamination.
  • Works with any substrate shape and rotation.
  • Reduced maintenance and cost compared to quartz crystal and optical monitors.

How it Works

  • The system collects the plasma emission in the range 190-800 nm in real-time and analyzes the spectrum to detect specific emission peaks of some elements and radicals, that are specific for the deposition/etching process.
  • The system launches a probe beam of light at a wavelength, specific to the element it needs to monitor. It uses a specific hollow cathode light (HCL) sources, which emit the desired wavelength.
Brochure

Specifications

The Spectrum Fidelity ZX™️ is integrated by Acquired Data Solutions. We combine NI Hardware with a comprehensive Software Suite and RF Playback/Record Tool kit to create a COTS out of the box experience.

  • Multi-Channel Phase Coherent Playback and Record: RF playback (emulation) and record(capture) with single and multi-channel coherency. Multiple configurations are available, current up to 8 channels expanding to 12+.
  • Very High RF Instantaneous Bandwidth: 200 – 500 MHz instantaneous bandwidth currently available with future upgrades to 1 GHz bandwidth.
  • Real-Time Signal Analysis: Full bandwidth real-time analysis and triggered-event capture, trigger one or more channels on analysis events, flexible app-driven software supports, and FPGA real-time processing and channel emulation.

Hardware

  • NI VI 2.0 PXle-5840: Vector Signal Transceiver (9 kHz – 6 GHz, 1 GHz BW)
  • NI PXle-6675T: Time Module
  • NI PXI FlexRio Compressor Module: Adds FPGA-based signal processing capability to PXI systems and can stream high bandwidth
  • Single Slot RAID

Software

  • LibertyGT® COTS: Integrated RF measurement science framework and software suite
  • COTS APP: RF single and multi-channel processing. Spectrum Analyzer with Meters, Advanced Wideband Record & Review, Advanced Wideband Playback, Real-Time Spectrum Analyzer, Real-Time Vector Signal Analyzer, Real-Time Vector Signal Generator, Multi-Channel Sync, SATCOM Channel Emulator, SDR.
  • COTS LGT Executive: Home Screen, Concurrency Manager, Hardware Abstraction Layer, API with LabVIEW support, 1080 HP touch-screen GUI with dual display support, LabVIEW and TestStand run-times, remote interface, examples.
  • App-driven Modules and Touch-Screen: Implementation for improved ease of use and application flexibility.

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